Measuring Furnace Temperatures in Oxidizing Atmospheres

Source: AZO Materials

Measuring temperatures inside a furnace can present a number of challenges: temperature cycling, high temperatures and hostile atmospheres exceeding the limits of several measurement devices while others have significantly reduced lifetimes and poor accuracy. This article discusses some of the challenges associated with temperature measurement in furnaces where oxidizing and reducing atmospheres are employed in microelectronics fabrication.

An excerpt:

"The Type K is low-priced and can be used across a temperature range from -200 to 1250 °C (-328 to 2282 °F). However, metallurgical changes at temperatures more than 1000 °C (1832 °F) decrease accuracy, and cycling via this temperature induces hysteresis effects, further reducing accuracy. Type K thermocouples are also vulnerable to corrosion in an oxidizing atmosphere."

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